Covalent Metrology
927 Thompson Pl
Sunnyvale, CA


March 11, 2024
9:30 – 4:00 pm

Short Course:
March 12-14, 2024
9:00 – 5:00 pm each day



Seminar Overview

  • Introduction to Covalent Metrology
  • Theory and Fundamentals of Ellipsometry
  • Spectroscopic Ellipsometry Data Analysis
  • Spectroscopic Ellipsometry Applications
  • Overview of J.A. Woollam Instruments
  • Tour and Demonstration of the RC2 Spectroscopic Ellipsometer

Day 1 Overview

  • Transparent layers
  • Cauchy Dispersion
  • Thickness PreFit
  • Global Fit
  • Roughness
  • Index Grading
  • Absorbing Films
  • B-Spline

Day 2 Overview

  • Semi-Absorbing Films
  • Convert to Transparent B-Spline
  • Wavelength Expansion Fits
  • Gen-Osc
  • Oscillator Model Theory

Day 3 Overview

  • Thin Absorbing Materials
  • Fitting SE + Transmission
  • Interference Enhancement
  • Multiple-Sample Analysis
  • Mapping Data
  • Review

Hotel Information

AC Hotel by Marriott Sunnyvale Cupertino
597 East El Camino Real, Sunnyvale, California, USA, 94087

Tel: +1 408-733-7950

Courtyard by Marriott Sunnyvale Mountain View
660 W El Camino Real, Sunnyvale, CA 94087

Tel: +1 800-228-9290

Airport Information

San Jose Mineta International Airport (SJC) is the primary airport for the Sunnyvale area. (8 miles from course location)

San Francisco International Airport (SFO) is an alternative airport. (30 miles from course location)


Coffee, juice and snacks will be provided during morning and afternoon breaks. No lunch will be provided, but many restaurants are located nearby.


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