RC2 Ellipsometer

The RC2® design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry.

OVERVIEW

Why an RC2?

Advanced Measurement Capabilities

The RC2 is the first commercial spectroscopic ellipsometer to collect all 16 elements of the Mueller matrix. Mueller matrix SE allows characterization of the most advanced samples and nanostructures.

Best Measurement Accuracy

Advanced measurement capabilities allow the best accuracy from fast CCD-based ellipsometry.

Dual Rotating Compensators

Synchronous rotation of two compensators provides high accuracy, high speed, and complete Mueller-matrix measurements.

Achromatic Compensator Design*

New achromatic compensator design with optimized performance over a wide spectral range. *patent pending

Wide Spectral Range

Collect over 1000 wavelengths from the ultraviolet to the near infrared – all simultaneously.

Fast Measurement Speed

Synchronous operation of both compensators allows highly accurate data without waiting to “zone-average” over optical elements. Collect the entire spectrum (over 1000 wavelengths) simultaneously in a fraction of a second.

Advanced “Dual” Light Source

Dual light source for extended spectral range with computer control of beam intensity. Automatically optimize signal on any sample (low or high reflection).

APPLICATIONS

ANISOTROPY APPLICATIONS

Generalized Ellipsometry

Traditional ellipsometry measurements are ideal for standard thin film characterization. However, more advanced measurements are required for anisotropic materials.

Generalized Ellipsometry collects six values compared to the standard two (Ψ, ∆). This additional information completely characterizes the cross-polarization of anisotropic samples.

Jones Matrix for Anisotropic Sample:
jones-matrix-for-anisotropic-sample

Generalized Ellipsometry Measures:

generalized-ellipsometry-measurements-equation

pen-optical-constants

Anisotropic PEN (Polyethylene Naphthalate) Generalized Ellipsometry measurements of the transmitted beam provide high sensitivity to the birefringence in anisotropic PEN films.

Variable Angle Generalized Ellipsometry was used to fully characterize the biaxial indices (nx ≠ ny ≠ nz) of the PEN substrate.

Complete Mueller-matrix

The RC2 can characterize the full Mueller-matrix of a sample. This advanced data type insures appropriate characterization of complex samples that are both anisotropic and depolarizing.

Mueller matrix for anisotropic, depolarizing sample:

anisotropic-mueller-matrix-equation

Viewing the entire Mueller matrix allows access to different polarization effects in advanced samples. The yellow and green sections are related to Diattenuation and Polarizance, respectively. The red section shows unrotated Retardance. Further rotating the sample will shift this information into different regions of the Mueller matrix.

Viewing the entire Mueller matrix allows access to different polarization effects in advanced samples. The yellow and green sections are related to Diattenuation and Polarizance, respectively. The red section shows unrotated Retardance. Further rotating the sample will shift this information into different regions of the Mueller matrix.

rotation-mueller-matrix-ellipsometry-data

Rotation MM-SE scan shows the retardation signature from an anisotropic sample in the bottom-right nine elements.

Liquid Crystal

Twisted nematic liquid crystal films introduce the complexity of an anisotropic film with a smoothly varying optical axis. With the thick liquid crystal layer sandwiched between glass substrates, the Mueller-matrix measurements insure the best measurement.

twisted-liquid-crystal

The complete Mueller-matrix was measured for a twisted liquid crystal. This enabled characterization of the optical axis twist and pre-tilt, and liquid crystal anisotropic refractive index.

liquid-crystal-mueller-matrix-ellipsometry-data

SPECIFICATIONS
Ellipsometer Configuration Dual RCE
Wavelength Range D
D+NIR
X
X+NIR
X+XNIR
U
U+NIR
193-1000 nm
193-1690 nm
210-1000 nm
210-1690 nm
210-2500 nm
210-1000 nm
210-1690 nm
Number of Wavelengths D
D+NIR
X
X+NIR
X+XNIR
U
U+NIR
~800
~1075
~790
~1065
~1065
~790
~1065
Detector CCD
Angles of Incidence 45°-90° (Automated Angle Base)
20°-90° (Vertical Automated Angle Base)
~65° (Focused Base)
65° (Fixed Angle Base)
65° (Test Base)
Data Acquisition Rate
(Complete Spectrum)
0.3 seconds (2-10 seconds is Typical)
Max substrate thickness 18mm

Facility Requirements

Power 100/240 VAC, 47-63Hz, <1 Amp

FAQ

Is automated mapping included?
The RC2 is highly customizable.  We offer several options for automated mapping.

Is table included?
The table pictured is an optional feature convenient for containing computer and electronics.

Can the RC2 be used in situ?
Yes.  Modular source and receiver can be attached to chamber.

Which software package is included?
CompleteEASE

What is the difference between M-2000 and RC2?
The M-2000 was the first widely-used high-speed ellipsometer.  It has a long history of success in research and production, and it’s optical design includes a single rotating compensator.  The RC2 is a newer design with many of the same great features combined with innovative new technology.  Further, it has two rotating compensators, which allow measurement of the full Mueller-matrix.