Why a theta-SE?
The theta-SE comes equipped with 300 mm sample mapping, small-spot measurement beam, fast sample alignment, look-down camera and our latest Dual-Rotation ellipsometer technology. The theta-SE has everything you need to measure the spatial uniformity of your film thickness and optical properties.
Sample throughput is optimized by using fast point-to-point translation, high-speed sample alignment and Dual-Rotation ellipsometer technology for continuous data collection.
The patent-pending, Dual-Theta rotation stage enables full, 300 mm mapping in a small, table-top instrument. The instrument footprint is only slightly larger than a 300 mm wafer.
Automated data analysis and built-in reporting enables push-button operation and quick access to measurement results.
The theta-SE delivers the power of spectroscopic ellipsometry and 300 mm uniformity mapping at a reasonable price.