The next generation of ellipsometry software has arrived with CompleteEASE®, our revolutionary new software for Woollam ellipsometers. It’s easier than ever to use, and with the world-class quality you’ve come to expect from Woollam Company. CompleteEASE is included with M-2000, RC2, iSE, theta-SE, and alpha-SE systems.
CompleteEASE® is an all-inclusive software package to handle all your ellipsometry requirements. Conveniently measure the uniformity of your samples with automated sample mapping. Collect in-situ data with spectroscopic ellipsometry on your process chamber or with add-on temperature control stage or liquid cell. All your data acquisition needs are combined into one easy-to-use software package.
Create your own recipes to collect data, automate mapping and analyze your samples – contained in one step. Convenience and simplicity combine for push-button operation.
Complete Database of Materials & Models
CompleteEASE® includes built-in models covering a wide range of typical samples. Built-in models conveniently describe how to process the data to determine thin film properties. CompleteEASE also includes over 400 material files and dispersion equations to approach a wide variety of thin films – from dielectrics and organics to semiconductors and metals.
The CompleteEASE Thickness Pre-Fit quickly and automatically finds the best thickness to match the data using a special patented algorithm. Eliminate the guesswork when nominal film thickness is unknown.
The thickness of a film is measured by ellipsometry based on the interference oscillations caused by light combining from surface and from bottom of film. The thicker the film, the more oscillations.
The B-spline layer was developed in CompleteEASE as an alternative to direct fits or oscillator models. It combines the benefits of (i) reduced number of fi t parameters, (ii) complete flexibility in optical constants for any material, and (iii) remove the guesswork of where to place oscillators and what type to choose. Especially valuable for describing complex dispersion shapes. Advanced features of the B-spline include the ability to customize resolution and maintain KK consistency.
B-Spline for micro-crystalline germanium film. The e2 spectra is defined by control points; e1 is calculated from KK transform.
B-Spline for gallium nitride with custom node spacing for ultra resolution near the bandgap.
Generalized Oscillator Layer
Build your own oscillators, beginning with a number of built-in functions, including:
Automated Model Testing
Quickly test and compare different models for your sample. CompleteEASE will report the performance of an ideal model compared to models with roughness and/or grading. It then suggests the most likely solution.
The Fit Log is a useful tool for tracking results of multiple samples or different analysis approaches. From the Fit Log, you can conveniently compare fit parameters and optical constants.
Viewing & Reporting Your Results
Optical constants can be saved into a tabulated list of n & k. Copy your results to the clipboard; including analysis model, fit results, and plots of experimental and model-generated data. Graphs and tables provide information about your sample and material properties. All can be copied to the clipboard or let CompleteEASE automatically build your report for you.
In-situ Analysis & Control
CompleteEASE® is the perfect interface for real-time data acquisition, monitoring and control. It leverages the Woollam Company’s vast in situ spectroscopic ellipsometry (SE) experience within a user-friendly interface.
In situ SE data contains a “wealth of information”. Measurements can witness the sample before, during and after processing. Dynamic data will actually consist of a complete spectrum of data at each measurement point.
Often, the best way to utilize all this information is through the CompleteEASE “MULTI-TIME” Analysis.
Multiple “time slices” selected during film growth.
Data from all time slices are modeled to determine thickness and optical constants.
The Mueller-matrix is the most complete optical “picture” of a sample, including both anisotropic and depolarizing effects. CompleteEASE has enhanced graphing and model manipulation to handle Mueller-matrix data.