VASE Ellipsometer

The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:
• Reflection and Transmission Ellipsometry
• Generalized Ellipsometry (Anisotropy, Retardance, Birefringence)
• Reflectance (R) and Transmittance (T) intensity
• Cross-polarized R/T
• Depolarization
• Scatterometry
• Mueller-matrix

Why a VASE?

Maximum Data Accuracy

The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder® for unparalleled data accuracy.

High Precision Wavelength Selection

The scanning monochromator is designed specifically for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy and light throughput, while automatically controlling selection of wavelengths and spectral resolution.

Flexible Measurements

The VASE features a vertical sample mount to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.

AutoRetarder® Technology

Rotating Analyzer Ellipsometers (RAE) maximize data accuracy near the “Brewster” condition – where Ψ/Δ data are content-rich. However, this region can be limiting for samples with reduced signal. The patented AutoRetarder is a computer controlled waveplate which modifies the light beam polarization before it reaches the sample. This produces optimum measurement conditions for any sample – under any conditions.

AutoRetarder accurately measures:

• Ψ and Δ over the full range!
• Generalized (anisotropic) Ellipsometry
• Depolarization data
• Mueller-matrix data