Ellipsometry Reference Books

Spectroscopic Ellipsometry: Practical Application to Thin Film Characterization
by Harland G. Tompkins, James N. Hilfiker
Momentum Press, 2016.

ISBN 978-1606507278

Spectroscopic Ellipsometry: Principles and Applications
by Hiroyuki Fujiwara
John Wiley & Sons, 2007.

ISBN: 978-0470016084

Ellipsometry at the Nanoscale
by Maria Losurdo  (Editor), Kurt Hingerl  (Editor)
Springer, 2013.

ISBN 978-3-642-33955-4

Ellipsometry of Functional Organic Surfaces and Films 2nd ed. 2018 Edition
by Karsten Hinrichs (Editor), Klaus-Jochen Eichhorn (Editor)
Springer, 2018.

ISBN 978-3313758947

Spectroscopic Ellipsometry for Photovoltaics: Volume 1: Fundamental Principles and Solar Cell Characterization
by Hiroyuki Fujiwara (Editor), Robert Collins (Editor)
Springer, 2018.

ISBN 978-3319753751

Handbook of Ellipsometry
by Harland Tompkins (Editor), Eugene A Haber (Editor)
William Andrew Publishing, 2005.

ISBN 978-0815514992

Ellipsometry and Polarized Light
by R.M.A. Azzam, N.M. Bashara
North Holland Press, 1977.

ISBN 978-0444870162