M-2000 Ellipsometer

The M-2000® line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition combine in an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy. Our patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and process control to large-area uniformity mapping and general purpose thin film characterization. No other ellipsometer technology acquires a full spectrum faster.

Why an M-2000?

Advanced Ellipsometer Technology

The M-2000 utilizes our patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision.

Fast Spectral Detection

The RCE design is compatible with advanced, proven CCD detection to measure ALL wavelengths simultaneously.

Wide Spectral Range

Collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously.

Flexible System Integration

With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of our table-top bases.


Advanced design ensures accurate ellipsometry measurements for any sample.