Spectroscopic Ellipsometers

M-2000

Rotating compensator technology. Many spectral ranges available up to 193-1690 nm.

RC2

Dual rotating compensator technology gives you the ability to determine all 16 Mueller Matrix elements.

iSE

Dedicated in situ instrument for applications that require real-time results.

VASE

Variable angle spectroscopic ellipsometer with wide spectral range of up to 193-3200 nm.

alpha-SE

Spectroscopic Ellipsometry has never been easier! Simple, low cost system for measuring index and thickness. Spectral range of 380-900 nm.

IR-VASE Mark II

Covers a wide spectral range from 2 to 30 microns.  This ellipsometer is used to characterize both thin films and bulk materials.

VUV-VASE

Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248 nm, 193 nm, and 157 nm. Spectral range up to 146-2500nm.