VUV-VASE Ellipsometer

The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.


Wide Spectral Range

The VUV-VASE covers wavelengths from below 140nm to 2500nm.

High Accuracy

Utilizing our patented AutoRetarder®, the VUV-VASE guarantees accuracy for any sample measurement.

Convenient Sample Loading

Special design allows fast, efficient sample loading without contaminating system purge.

Protect Your Samples

The monochromator is placed before the sample to limit exposure of photosensitive materials.