VUV-VASE Ellipsometer

The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterization of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterize numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.

OVERVIEW

Why a VUV-VASE?

Wide Spectral Range

The VUV-VASE covers wavelengths from below 140nm to 1700nm.

High Accuracy

Utilizing our patented AutoRetarder®, the VUV-VASE guarantees accuracy for any sample measurement.

Convenient Sample Loading

Special design allows fast, efficient sample loading without contaminating system purge.

Protect Your Samples

The monochromator is placed before the sample to limit exposure of photosensitive materials.

APPLICATIONS

LITHOGRAPHY APPLICATIONS

Lithography thin films were an important motivation for the VUV-VASE® development. It has been successfully used to characterize all types of films in this area, including:
• Photoresists
• Bottom and Top AR Coatings
• Photomask Coatings
• Hardmasks
• Stepper Optical Coatings
• Pellicles
•CaF2 Optics
• And more…

PHOTORESIST

Measure film thickness and refractive index (n and k) at all lithography lines: 157nm, 193nm, 248nm…

photoresist-graph-for-vuv-vase

SPECIFICATIONS
Ellipsometer Configuration RAE with AutoRetarder
Wavelength Range VUV-VASE (Standard)
VUV-VASE+NIR
VUV-VASE+XNIR
146-1100 nm
146-1100 nm
146-2500 nm
Number of Wavelengths User defined before measurement
Angles of Incidence 10° to 90° (146nm to 310nm)
25° to 90° (310nm to 2500nm)
Data Acquisition Rate 1 to 3 seconds per wavelength

Facility Requirements

Power 100-120 VAC/15A, 200-240 VAC/8A
Gas Requirements Contact J.A. Woollam for details.

Dimensions

vuv-vase-dimensions

FAQ

What is the difference between Gen I and Gen II?
Gen II can accommodate larger samples (up to 300mm diameter) and has automated mapping options.

Which software package is included?
WVASE