2021 Fall WVASE Online Short Course


Online Webinar


Schedule below for live sessions.

Recordings will be available after each session.

Introductory Seminar:
September 9, 2021

Session 1:
September 13, 2021

Session 2:
September 16, 2021

Session 3:
September 20, 2021

Session 4:
September 23, 2021

Session 5:
September 27, 2021

Session 6:
September 30, 2021


1:00-3:00 PM CDT

Each session is ~2 hours in length.


Customers using WVASE® software


Registration ends September 3, 2021


$500 Standard Price

$250 University Price


J.A. Woollam Tuition Credit
(2 participants per credit)

The J.A. Woollam Company is proud to announce an Internet-based ellipsometric data analysis course designed for WVASE® software users. We will introduce the fundamentals of data analysis at a beginner to intermediate level. There will be seven session in total (the last one is optional), with two sessions per week spread out over a 3.5 weeks. The sessions will be ~1.5 to 2 hours long.

If you use a different J.A. Woollam software package (i.e. CompleteEASE), please contact us about our other short courses that may be of interest to you.

Course Details

Each registered participant will be invited to participate in sessions, and to view recordings of each session afterwards. In addition to internet sessions, students will receive relevant example data sets to practice. Homework can be sent to the instructor as a WVASE® environment file for review prior to the next session. Registered participants who submit all the homework will receive Certificates of Participation.

The Registration fee also includes access to a pdf of each session, as well as a pdf of the WVASE® Software Training manual as a download.

Internet conferencing

Participants must have internet access to participate in the webinar so they can log onto the course via GoToWebinar. For audio, participants can either call one of the numbers provided by GoToWebinar at the time of the session, or access audio from their computer via a VoIP connection from GoToWebinar. Participants who are from the same organization/facility are welcome to participate from a conference room using a commonly shared computer, projector and audio connection.

Recordings of all sessions will made available to registered participants during the course and for a period after the final session.

For more information or questions, please contact Tom Tiwald at ttiwald@jawoollam.com


Introductory Seminar

  • Basic Theory
  • Overview of Data Analysis Strategies
  • Flow of SE Data Analysis


Session 1: Dielectric substrates & transparent films

  • Fitting native oxides on semiconductors
  • The Cauchy function
  • Films: Thickness & index effects
  • Surface roughness, Global fits, Simple Grading
  • Ultra thin films


Session 2: Pt-by-pt fits & Intro to the Genosc layer

  • Point-by-point fits for UV-absorbing materials
  • Introduction to the Genosc layer
  • Oscillator functions
  • Fitting reference materials in the Genosc layer

September 20

Session 3: Applying the Genosc layer to ellipsometric data

  • Using prebuilt Genosc layers
  • Building Genosc layers from reference
  • Create reference from pt-by-pt fit, then build Genosc layer

September 23

Session 4: Nonideal samples & introduction to anisotropy

  • Simple Grading
  • Nonideal samples: measurements, modeling  & analysis
  • Anisotropy: description, modeling & analysis (anisotropic transparent films only)


Session 5: Absorbing materials

  • Modeling slightly absorbing substrates
  • Opaque substrates
  • Combining ellipsometry with transmission data
  • Interference Enhancement

September 30

Session 6: Case studies

We will review the complete analysis sequence of several “Case Studies”. We will discuss when and how we apply the various the tools learned in the short course to a complete analysis sequence, and emphasize best practices, including:

  • Choosing measurement parameters
  • Deciding if substrate analysis is necessary
  • Modeling choices from start to finish: srough, grading, etc.