IR-VASE® Data Acquisition & Analysis Online Short Course




April 7, 9, 14, 16, 21, 23, 28, 30 – 2020

8 sessions

TIME (adjust for your time zone):

1:00-3:00 PM US CDT (GMT-5)

Each session  will be 1.5 to 2 hours


IR-VASE Customers


$500 Standard Price

$250 University Price

IR ellipsometry data acquisition and analysis requires unique skills that are different than UV/visible wavelength ellipsometry. We are offering this Internet-based course to help our IR-VASE® customers develop these skills. The course will consist of an Introduction to Ellipsometry session on September 8th, followed by seven sessions – two sessions per week over 4 weeks.

Course Details

Each registered participant will be invited to participate in sessions, and to view recordings of each session afterwards. In addition to internet-sessions, students will receive relevant example data sets to practice. Homework can be sent to the instructor as a WVASE Environment file for review prior to the next session. Registered participants who submit >70% of the homework will receive a certificate of participation.

For most sessions, the course will follow the WVASE® Software Training Manual for IR-VASE, and will use a number of examples from that manual. PDF copies of the manual will be made available to participants.

Internet conferencing

Participants must have internet access to participate in the webinar so they can log onto the course via GoToWebinar. For audio, participants can either call one of the numbers provided by GoToWebinar at the time of the session, or access audio from their computer via a VoIP connection from GoToWebinar. Participants who are from the same organization/facility are welcome to participate from a conference room using a commonly shared computer, projector and audio connection.

Recordings of all sessions will made available to participants during the course and for a period afterwards.

For more information please contact Tom Tiwald at

Register below to reserve your spot now. Space is limited.


April 7

Session 1: Introduction to Ellipsometry

  • Theory
  • Light & polarization
  • Instrumentation
  • Light & materials
  • Interfaces & films
  • Intro to Modeling & Analysis
  • Intro to WVASE analysis software

April 9

Session 2: IR-VASE Sample Preparation & Data Acquisition

  • IR-VASE Scan dialog box
  • Choosing acquisition parameters
  • Backside reflections & Backside roughening
  • Beam size & masking

April 14

Session 3: Transparent & Absorbing Substrates

  • Genosc layer for IR data
  • Data simulation
  • Surface Roughness
  • Pt-by-pt fit
  • Oscillators for Absorption

April 16

Session 4: Transparent & Absorbing Films

  • Interpreting Ψ oscillations: index contrast & thickness
  • Gaussian & Lorentz oscillators
  • Point-by-point fit & Gen-Osc layer

April 21

Session 5: Free Carrier Effects (doping)

  • Drude model
  • Effect sensitivity for IR wavelengths
  • Fitting doped substrates & layers

April 23

Session 6: Non-Ideal Samples & Measurements

  • Grading
  • Measurement non-idealities: effects on Ψ & Δ
  • %Depolarization

April 28

Session 7: Advanced Topics

  • Multisample (Multi-dataset) Analysis
  • Analysis of combined IR-VASE & UV-visible-NIR data
  • Analysis of combined ellipsometric & transmission data
  • Separate angle analysis example

April 30

Session 8: Anisotropy

  • Description
  • Measurement
  • Building Anisotropic models
  • Simultaneous analysis of multiple samples and/or sample orientations