The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.

It combines high accuracy and precision with a wide spectral range up to 193 to 2500nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:

• Reflection and Transmission Ellipsometry
• Generalized Ellipsometry
• Reflectance (R) intensity
• Transmittance (T) intensity
• Cross-polarized R/T
• Depolarization
• Scatterometry
• Mueller-matrix

Why a VASE?

Maximum Data Accuracy
The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder® for unparalleled data accuracy.

High Precision Wavelength Selection
The HS-190™ scanning monochromator is designed specifically for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy, and light throughput, while automatically controlling selection of wavelengths and spectral resolution.

Flexible Measurements
The V-VASE features a vertical sample mount to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.