Why a VASE?
Maximum Data Accuracy
The VASE features a rotating analyzer ellipsometer
(RAE) combined with our patented AutoRetarder®
for unparalleled data accuracy.
High Precision Wavelength Selection
The HS-190™ scanning monochromator is designed
specifically for spectroscopic ellipsometry. It optimizes
speed, wavelength accuracy, and light throughput, while
automatically controlling selection of wavelengths and
The V-VASE features a vertical sample mount
to accommodate a large variety of measurement
geometries including reflection, transmission,