M-2000^® Ellipsometer Options

Mapping Stage
Both manual and fully automated sample translation are available in a variety of sizes. Perfect for mapping samples.

500uL Liquid Cell
A cell with optical windows measures at 70° through a liquid ambient. Allows study of liquid/solid interface. Liquid volume is approximately 500uL.

5mL Liquid Cell
A cell with optical windows measures at 75° through a liquid ambient. Allows study of liquid/solid interface. Liquid volume is approximately 5mL.

5mL Heated Liquid Cell
A cell with optical windows measures at 75° through a liquid ambient. Liquid volume is approximately 5mL. From room temperature up to 50°C with 5mL heated reservoir prior to cell.

Heat Stage
Controls the temperature of your sample from room temperature to 300º C. Holds a sample up to 50mm in diameter.

Camera
Zooms in on a patterned wafer to
position spot accurately.

Focusing Probes
Reduce spot size to as little as 30 microns, depending on the model.