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IR-VASE® Ellipsometer

IR-VASE ellipsometer
1st Generation IR-VASE
The IR-VASE® is the first and only spectroscopic ellipsometer to cover the spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). The IR-VASE can determine both n and k for materials over the entire width of the spectral range without extrapolating data outside the measured range, as with a Kramers-Kronig analysis. Like other Woollam ellipsometers, the IR-VASE is perfect for thin films or bulk materials including dielectrics, semiconductors, polymers, and metals.  


 

IR-VASE ellipsometer spectral range

Why an IR-VASE?

Non-destructive Characterization

The IR-VASE offers non-contact measurements of many different material properties including thickness optical constants, material composition, chemical bonding, doping concentration, and more. Measurements do not require vacuum and can be used to study liquid/solid interfaces common in biology and chemistry applications.

No Baseline or Reference Sample Required

Ellipsometry is a modulation technique that does not require scans or reference samples to maintain accuracy. Even samples that are smaller than the beam diameter can be measured because the entire beam does not need to be collected.

Highly Accurate Measurement

Patented calibration and data acquisition procedures remove effects of imperfect optical elements to provide accurate measurements of Ψ and Δ.

 

IR-VASE Ellipsometer
1st Generation IR-VASE

 

 

 
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