IR-VASE Mark II Ellipsometer - J.A. Woollam Co.





IR-VASE Mark II Ellipsometer

The IR-VASE® Mark II is the only spectroscopic ellipsometer to cover the spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). The IR-VASE can determine both n and k for materials over the entire width of the spectral range without extrapolating data outside the measured range, as with a Kramers-Kronig analysis. Like other Woollam ellipsometers, the IR-VASE is perfect for thin films or bulk materials including dielectrics, semiconductors, polymers, and metals.  

Why an IR-VASE Mark II?

Wide Spectral Range

Near to far infrared:
1.7 to 30 microns (333 to 5900 cm-1)
User-specified resolution from 1 to 64 cm-1

High Sensitivity to Ultra-thin Films

Spectroscopic ellipsometry data contain both “phase” and “amplitude” information from reflected or transmitted light. IR ellipsometry offers higher sensitivity to ultrathin films than FTIR reflection/absorbance, while retaining sensitivity to chemical composition.

Non-destructive Characterization

The IR-VASE offers non-contact measurements of many different material properties including thickness optical constants, material composition, chemical bonding, doping concentration, and more. Measurements do not require vacuum and can be used to study liquid/solid interfaces common in biology and chemistry applications.

No Baseline or Reference Sample Required

Ellipsometry is a modulation technique that does not require scans or reference samples to maintain accuracy. Even samples that are smaller than the beam diameter can be measured because the entire beam does not need to be collected.

Highly Accurate Measurement

Patented calibration and data acquisition procedures remove effects of imperfect optical elements to provide accurate measurements of Ψ and Δ.





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LINCOLN, NE 68508-2243 USA
Ph. 402.477.7501 | Fx. 402.477.8214