Molecular Bond Vibrations Like standard FTIR spectroscopy, IR ellipsometry relies on the information about molecular bond vibrations. Infrared absorption caused by these vibrations can be studied in bulk or thin film materials. IR ellipsometry offers increased sensitivity over FTIR spectroscopy. It also presents the advantage of obtaining both n and k rather than just absorbance values. Figures below show measured optical constants of a silicone thin film with vibrational absorptions labeled.

Multilayer Characterization
Multilayer films can be extensively studied using the wide spectral range and variable angle capability of the IR-VASE®. Multiple angles provide additional information by changing the light's path length through each layer. The following results show sensitivity to 3 layers. Infrared optical contrast between similar materials allows measurement of each layer's thickness.

Epitaxial Layers, Doping Concentration and Doping Profiles
At infrared wavelengths, the difference in free-carrier levels can cause optical contrast between epitaxial or implanted layers. This gives IR-VASE® excellent sensitivity to epitaxial layer thickness and substrate doping concentration. The ellipsometer also has good sensitivity to carrier gradients at interfaces. Carrier profiles show near-perfect in agreement when nondestructive IR-VASE® and destructive SIMS measurements are compared.

T.E. Tiwald et al., Phys. Rev. B, 60 (1999) 11 464.

Phonon Structure (Compound Semiconductors)
The Wide spectral range IR-VASE® is important for phonon absorption studies. Data on the left show phonon modes of a GaN / AlGaN laser structure, modeled to determine alloy ratios, doping concentrations, and film quality.

M. Schubert et al., SPIE Vol. 4449-8 (2001)

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