• Single Scan Mode  
  Used to acquire and analyze data at a single point in time.

• Dynamic Scan Mode  
  Used to acquire and analyze real-time ellipsometry data. This mode (shown in Figure 1) displays the model and allows the user to change the model in real time.

• Simple Mode 
  Used to acquire and analyze real-time ellipsometry data. This mode (shown in Figure 2) provides a push-button interface to pre-built models and a graph that displays the model fit parameter in real-time.  

The graphs of the CompleteEASE™ program are also an important user interface component.  Not only do they display data, but they interact with the data and models to allow the user to easily select time ranges, wavelength ranges, and model dependant parameters such as time-slices for fitting and defining a time range for a virtual interface.  These are just a couple of examples of how the graphs can be used to efficiently sift through the enormous amount of data that can be acquired with in-situ ellipsometry.  

Figure 1. CompleteEASE™ software in "Dynamic Mode". The top graph displays data versus time at five wavelengths.  The bottom graph displays data versus wavelength. This graph is updated as soon as each new spectroscopic scan is acquired.  

Figure 2.  CompleteEASE™ software in "Simple Mode".  The top graph displays data verses time at 5 wavelengths.  The bottom graph displays the model fit parameter (in this case a-Si thickness) as it varies with time.  In Simple Mode the user chooses from pre-built models making data acquisition and analysis possible for people with little or no ellipsometry experience.