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VUV-VASE® Models

VUV-VASE Gen - I
Maximum sample size: 200mm
No mapping options available
VUV-VASE Ellipsometer Gen-I
VUV-VASE Gen - II
Maximum sample size: 300mm
Mapping options are available
VUV-VASE Ellipsometer Gen-II
 

 

 

 
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