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VASEManager®

VASEManager is an easy to use front-end program to WVASE32® that gives you all of the power and functionality of a research spectroscopic ellipsometer with a user friendly interface that does the work for you. Recipes are written to control data acquisition, analysis, and pattern mapping. In this way, most users do not need to be ellipsometry experts to acquire and analyze data from repeated sample types. The user simply chooses the Project and Recipe and follows the prompts. The recipe returns results after the measurement is complete. Results are also saved in the project.

Spectroscopic Ellipsometry Software VASEManager screen shot

Key Features

  • Automates both data measurement and analysis
  • Defines circular or rectangular pattern shapes and any number of points to map.
  • User can define multiple measurements in a single recipe.
  • Assigns each user one of the three user levels with corresponding access levels.
  • VASEManager prompts user to perform a routine maintenance after a designated period of time.
  • Recipe can specify bounds for each fit parameter.  VASEManager prompts the operator if the sample fails to meet specifications.

    • Spectroscopic Ellipsometry Software VASEManager screen shot

Conveniently view results with reports and graphs in 2-D and 3-D graphics. Results and graphs can be easily printed or exported to Windows applications such as word processors and spreadsheets.

Spectroscopic Ellipsometry Software VASEManager screen shot
 

 
 
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