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VASE®Ellipsometer Applications

Telecommunications - Laser optics
Accurate wavelength selection using monochromator allows measurements at the operating wavelength for optics,
e.g. 1550nm, 1310nm, 980nm, 632.8nm, 589nm …

Optical Coatings
The AutoRetarder® measures Δ accurately even when close to 0° or 180° which helps characterize thin films on transparent substrates, such as glass or plastics.

Thick Films
For thicker films (>5 μm), good spectral resolution is needed to resolve the interference oscillation features of Ψ/Δ data. Operator defined monochromator step size and narrow bandwidth help resolve fine spectral features.

VASE Ellisometer Applications - Optical Coating Graph


VASE Ellisometer Applications - Semiconductor Graph

Semiconductors
Bandgap, electronic transitions and critical points can be measured for semiconductor materials such as GaN, InP, SiGe, CdTe, etc. Good wavelength resolution and ability to measure depolarization insure accurate optical constants.

Photosensitive Materials
The monochromator is positioned before the sample, so only low intensity monochromatic light strikes the sample. This prevents exposure of photosensitive samples.

VASE Ellisometer Applications - Photosensitive Materials Graph

 

 

 

 
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