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T-Solar™ Applications
| The T-Solar system was specifically designed to measure AR coatings on textured substrates, such as those shown below. Both the texturing and AR coating work to suppress reflection from the surface - making optical characterization challenging. | ||
 Examples of textured surfaces, coated with single-layer SiNx as AR coating. |
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Alkaline-etched Monocrystalline SiThe texturing produced from alkaline etch of monocrystalline silicon has a regular pattern of pyramids that etch along specifi ed directions of the silicon crystal. To measure this regular pattern of pyramids requires the special T-Solar measurement geometry. With the T-Solar, the sample stage can be tilted (and rotated) from the Standard Geometry to align the pyramids with the probe beam used for measurement.
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 The measurement configuration can be moved from standard geometry (for samples dominated by flat regions) to the Lateral (Tilt) Geometry for samples with textured pyramid surfaces. As shown in the figure, the data are very noisy due to lack of signal if the wrong geometry is measured. The T-Solar provides flexibility to measure in any geometry needed for textured and non-textured surfaces. |
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Modeling |
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Monocrystalline Silicon substrate measured on T-Solar. Standard Model does not reproduce the effects from pyramid structure and needs to be supplemented by scattering “factor” to correctly reproduce the Experimental Data.
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