RC2 Ellipsometer Applications


	Main

	Models

	Options

	Applications

	Gallery

	See All Events

RC2^® Ellipsometer Applications

Anisotropy Applications

Generalized Ellipsometry
Traditional ellipsometry measurements are ideal for standard thin film characterization. However, more advanced measurements are required for anisotropic materials.

Generalized Ellipsometry collects six values compared to the standard two (Ψ, ∆). This additional information completely characterizes the cross-polarization of anisotropic samples.

Jones Matrix and Generalized Ellipsometry Measurements

Anisotropic PEN (Polyethylene Naphthalate)

Generalized Ellipsometry measurements of the transmitted beam provide high sensitivity to the birefringence in anisotropic PEN films.

Anisotropic Polyethylene Naphthalate Optical Constants

Variable Angle Generalized Ellipsometry Graph 1

Variable Angle Generalized Ellipsometry Graph 2

Variable Angle Generalized Ellipsometry was used to fully
characterize the biaxial indices (n_x ≠ n_y ≠ n_z) of the PEN substrate.

Complete Mueller-matrix

The RC2 can characterize the full Mueller-matrix of a sample. This advanced data type insures appropriate characterization of complex samples that are both anisotropic and depolarizing.

Mueller-matrix for anisotropic depolarizing sample

Liquid Crystal

Twisted nematic liquid crystal films introduce the complexity of an anisotropic film with a smoothly varying optical axis. With the thick liquid crystal layer sandwiched between glass substrates, the Mueller-matrix measurements insure the best measurement.

The complete Mueller-matrix was measured for a twisted liquid crystal. This enabled characterization of the optical axis twist and pre-tilt, and liquid crystal anisotropic refractive index.

Complete Mueller-matrix measured for twisted liquid crystal

Thin Films

SiO₂ on Glass

Adjustable light output optimizes
measurements for low-reflection
coatings such as index matched
films on glass.

WVASE32 software fit for SiO2 film on glass

Psi Ellipsometry measurement of SiO2 thin film on glass

Delta Ellipsometry measurement of SiO2 thin film on glass

Si Rich Nitride

Get quick results for any thin film - whether a dielectric, organic, semiconductor, metal...and more.

WVASE32 software fit for Si Rich Nitride

Psi and Delta Ellipsometry graph for Si Rich Nitride

Comparison chart of optical constants for silicon-rich nitrides

Compare optical constants measured from a series of silicon-rich nitrides to study changes
with process conditions.

RC2® Ellipsometer Applications

RC2^® Ellipsometer Applications