DaiNippon Screen Mfg. Co. Ltd.

range, and ensures ease of measurement even in complex structures with unusual surface textures. It also features a spectroscopic ellipsometer that enables optical constant measurement (refractive index, extinction coefficient) of the target film, as well as multilayer film measurement, surface roughness analysis, and composition ratio measurement.

1. Measures film thickness and optical constants (refractive index, extinction coefficient) in textured film structures.
2. Enables high-precision measurement using multiple angles of incidence.
3. Sensitive to Ψ (0°- 90°) and ∆ (0°- 360°).
4. Capable of measurement in near infrared regions.
5. Use of CCD in light sensitive element ensures high-speed measurements.
6. Use of linear motor in X/Y stages allows high-speed, high-precision movement.
7. Panels are received by elevating pins, to support alignment functions.

For more information please visit the DNS website, www.screen.co.jp.