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1. R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).

2. J.M.M. de Nijs and A. van Silfhout, J. Opt. Soc. Am. A. 5, 733 (1988).

3. B. Drevillon, et. al., Rev. Sci. Instrum. 53, 969 (1982).

4. G.E. Jellison Jr. and F.A. Modine, Appl. Opt. 29, 959 (1990)

5. US Patent #5,757,494 “System and method or improving data acquisition capability in spectroscopic ellipsometers”.

6. R. Kleim, L. Kuntzler, and A. El Ghemmaz, J. Opt. Soc. Am. A 11, 2550 (1994).

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8. J. Opsal, et. al, Thin Solid Films 58 (1998).

9. T. E. Tiwald, et. al., Thin Solid Films 313-314, 69

10. US#5,872,630,“Regression spectroscopic rotating compensator ellipsometer system with photo array detector".

11. R. W. Collins, et. al.,Thin Solid Films 313-314, 18 (1998).

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