Application Notes:

Spectral range:
470 wavelengths
from 245nm to 1000nm

M-2000X Focused spectroscopic ellipsometer has been specially designed for measuring optical constants (n and k) of slider heads at fly height tester wavelengths (any wavelength from 245nm to 1000nm). The n and k values at wavelengths of interest can easily be plugged into fly height testers.

M-2000XF offers the following advantages over other spectroscopic ellipsometers for slider application:

Focused beam
The M-2000XF uses a focused beam, so the spot fits over small measurement locations.

Camera
A CCD camera helps easily position the spot on the slider.

Automatic measurements
The acquisition and analysis software is completely automated; you do not have to be an ellipsometry expert to run the instrument. The software guides you through the measurement process, returns and values at wavelengths of interest, and calculates fly height shift.

Adjustable spot size
You can choose from 5 different focused spot sizes (25 μm by 60 μm, 50 μm by 120 μm, 75 μm by 180 μm, 125 μm by 300 μm, and 175 μm by 420 μm). Changing the spot size allows you the flexibility to obtain a spot small enough to fit on the measurement pad and still get consistent results. In other cases (for example, when working with AlTiC substrates whose grain sizes are quite large) sampling over a large area, which can contain enough grains, is important for consistent results.

Rotating compensator CCD array technology
This system is based on our proven M-2000 technology which combines a rotating compensator optical design with a CCD array detection system. This provides the highest accuracy with an extremely fast acquisition time (maximum: 0.1 second, typical: 5 seconds). The M-2000VF acquires 325 wavelengths from 380nm to 900nm.

Normal Incidence Alignment System
A special alignment system was developed for samples that do not lie flat, such as slider heads. This ensures proper tilt adjustment for individual sliders, row bars, and head gimble assemblies (HGAs).