Further Reading:
1. John Burnett and Simon Kaplan, “Measurement of the Refractive Index and Thermo-Optic Coefficient of Water Near 193 nm”, Proc. SPIE, 5040, Optical Microlithography XVI (2003) 1742
2. Roger H. French et al., “Immersion Fluid Refractive Indices Using Prism Minimum Deviation Techniques, Proc. SPIE, 5377, Optical Microlithography XVII (2004) 1689.
3. Ron A. Synowicki, Greg K. Pribil et al., “Immersion Fluids for Lithography: Refractive Index Measurement Using Prism Minimum Deviation Techniques”, Semiconductor Fabtech, 22nd edition, Henley Publishing, (2004) 55.
4. R.A. Synowicki, Greg K. Pribil et al., “Fluid Refractive Index Measurements Using Rough Surface and Prism Minimum Deviation Techniques,” J. Vac. Sci. Tech. B, 22(6), (Nov/Dec 2004).
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