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alpha-SE^® Applications

Dielectric Films
With fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds. Log results for easy-to-use comparisons in both graphical and tabular formats.

A quick comparison of nitride thin films shows variation in the thickness and refractive index
with process condition.

Self-Assembled Monolayers
Phase information of a spectroscopic ellipsometry measurement is highly sensitive to very
thin films (<10nm). Self-assembled monolayers can be assessed and quickly compared using the alpha-SE.

For organic layers on golf, the phase parameter (Delta) shifts downward with increasing thickness.

Absorbing Films
Advanced models provide quick and efficient fits for a wide variety of materials you may encounter.

Materials
• a-Si
• poly-Si
• Diamond-like carbon
• Organic materials
• Organic LED films
• SiC

Models
• Lorentz
• Gaussian
• Harmonic
• Tauc-Lorentz
• Cody-Lorentz

Coating on Glass
Patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass. On transparent substrates, the alpha-SE® measures depolarization to correct for light returning from the backside of the substrate. This unwanted light can confuse other ellipsometers, but the alpha-SE® ensures accurate optical constants.

The high sensitivity of alpha-SE technology provides microstructural details that you can not get from Reflectance measurements. Here a thin film of Titanium Dioxide is measured with the alpha-SE and its index is found to vary between the substrate and surface. A graded model best describes this sample.

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