Dielectric Films
With fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying
thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds.
Log results for easy-to-use comparisons in both graphical and tabular formats.
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Self-Assembled Monolayers
Phase information of a spectroscopic ellipsometry measurement is highly sensitive to very
thin films (<10nm). Self-assembled monolayers can be assessed and quickly compared using
the alpha-SE.
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Absorbing Films
Advanced models provide quick and efficient fits
for a wide variety of materials you may encounter.
Materials
• a-Si
• poly-Si
• Diamond-like carbon
• Organic materials
• Organic LED films
• SiC |
Models
• Lorentz
• Gaussian
• Harmonic
• Tauc-Lorentz
• Cody-Lorentz |
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Coating on Glass
Patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass.
On transparent substrates, the alpha-SE® measures depolarization to correct for light returning from the backside of the substrate. This unwanted light can confuse other ellipsometers, but the alpha-SE® ensures accurate optical constants. |
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