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AccuMap-SE® ApplicationsDetermine uniformity of film thickness and optical AccuMap-SE Mapping Application
A microcrystalline silicon film was mapped at hundreds of points across a 1.1 x 1.3 meter panel. User defined routines acquire data over full panel (Figure 1). Spectra are analyzed at each position versus wavelength (Figure 2). Thickness and index maps over full panel are obtained (Figure 3).
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